UA-20935187-3
Air pollution environmentally friendly plasma scrubber

Plsasma Scrubber greenhouse gas (PFCs) plasma scrubber

Si- plasma  APX01
Plsasma Scrubber greenhouse gas (PFCs) plasma scrubber
Gas treatment process
plasma scrubber reactor
Gas detection equipment
GC gas phase analyzer
Plasma scrubbing compared to its type of equipment
Excellent plasma treatment performance (before treatment)
Excellent plasma treatment efficiency (after treatment)
Excellent plasma treatment performance
Excellent plasma treatment performance
Importance of greenhouse gas emissions management
Si- plasma  APX01
Plsasma Scrubber greenhouse gas (PFCs) plasma scrubber
Gas treatment process
plasma scrubber reactor
Gas detection equipment
GC gas phase analyzer
Plasma scrubbing compared to its type of equipment
Excellent plasma treatment performance (before treatment)
Excellent plasma treatment efficiency (after treatment)
Excellent plasma treatment performance
Excellent plasma treatment performance
Importance of greenhouse gas emissions management
Product Features
  • (1) High efficiency and low power consumption
  • (2) Automatic dosing machine can be connected externally (for wastewater pretreatment)
  • (3) The equipment is small in size and can be easily integrated into the in-line production line.
  • (4) Can handle tail gas emissions from equipment such as perfluorocarbons
  • (5) Can be connected with front-end process equipment to further reduce energy usage
Unique Functionalities
  • Gas detection equipment:
  • Ability to verify analytical results after gas treatment
  • Provide customer sampling and analysis services
Related solutions
  • [Excellent plasma treatment efficiency]
  • Actual measurement results of CF4 removal rate:
  • After treatment with CNT plasma washing equipment, CF4 DRE>95% was obtained through GC analysis.
  • CF4 pass concentration: 4%
  • After treatment with CNT plasma washing equipment, C2F6 DRE>98% was obtained through GC analysis.
  • C2F6 pass concentration: 4%

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