PVD ／PECVD Coating series
Hybrid 500-4A2S
Product Features
- Install 2 sets sputter source in 2 sides, and 4 sets cathodic arc model.
- Conform PVD and PECVD system, it can coat Me/DLC composite films. The Sputter system made column structure of nitride coating, and provided lubricating of DLC coating by PECVD system.
- Applications for cutting tools and automobile parts, wear resistance dies etc.
- Coatings：TiN、CrN、AlTiN、WC、Me/DLC etc.