PVD ／PECVD Coating series
PECVD coating System
Product Features
- High deposition rate and uniformity
- Three sputter gun system
- Multi gas input system
- Can add bias
- Easy to operate and maintain
- Automatic and good stability
- Customization
- Can combine optical emission spectroscopy to check and control plasma intensity
Related solutions
- Plasma processing system, such as surface treatment and surface modification
- Application in restaurants coating, such as an optical multi-layered film, superhard abrasion films (DLC, of TiN, TiC, etc.)