PVD /PECVD Coating series
FCVA100
Product Features
- ta-C Coating of equipment
- Filter cathodic vaccum arc (FCVA) process
- Foot print: W3590*D3100*H3400
- Internal chamber size(mm):525*482*H617 mm
- Usable plasma volume:D360*H100 mm
- Spindle(mm):D125*150*6
- Optimized thickness from 0.1 to 1 μm
- Cycle time:2.5~3h