UA-20935187-3
PVD /PECVD Coating series

FCVA100

FCVA100
FCVA100
Product Features
  • ta-C Coating of equipment
  • Filter cathodic vaccum arc (FCVA) process
  • Foot print: W3590*D3100*H3400
  • Internal chamber size(mm):525*482*H617 mm
  • Usable plasma volume:D360*H100 mm
  • Spindle(mm):D125*150*6
  • Optimized thickness from 0.1 to 1 μm
  • Cycle time:2.5~3h

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