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Creating Nano plasma waste gas treatment equipment effectively reduces carbon emissions and VOCs treatment in the semiconductor process

Creating Nano plasma waste gas treatment equipment effectively reduces carbon emissions and VOCs treatment in the semiconductor process
economic daily
June 24, 2024
Author Zhang Jie
 

In response to the global ESG trend, Creating Nano has developed a plasma scrubber based on its superior plasma development capabilities and coating technology, which can effectively destroy and decompose harmful waste gases generated during the coating and etching processes, especially It is a fluorine-containing greenhouse gas and is used in conjunction with a wet scrubbing process to discharge the treated waste gas or waste water. It has obvious benefits in reducing greenhouse gas emissions in the semiconductor process and treating VOCs emissions.
 

In view of the fact that the semiconductor industry is in the ascendant and the semiconductor CVD process, etching process, and diffusion process produce a large amount of fluorine-containing gas emissions, the carbon equivalent of which is about (CO2e) 5000-6000 times CO2, there is an urgent need to deal with it. Creating Nano Research Institute Developed plasma waste gas treatment equipment (plasma scrubber), which uses the plasma process to destroy and decompose harmful waste gases generated during the process, and is equipped with wet scrubbing to discharge the waste water.
 

Creating Nano stated that since the electrode design and power supply in the plasma scrubber are all developed by Creating Nano, they are not only highly efficient and low power consumption, but can also be connected to an automatic dosing machine. (Wastewater pretreatment), due to the small size of the equipment, it can be easily integrated into the in-line production line, and can process exhaust gases emitted by equipment such as perfluorocarbons, and can be connected to front-end process equipment to further reduce energy use.
 

Creating Nano pointed out that the plasma waste gas treatment equipment (plasma scrubber) developed is aimed at the technology industry (panel industry, semiconductor, PCB industry), traditional processes (petrochemical industry, textile industry, chemical process), waste gas treatment, and for Volatile Organic Compounds (VOCs) and other related industries not only have obvious benefits in reducing greenhouse gas emissions, but are also of great help to companies pursuing low-carbon emissions, carbon neutrality and other fields.
 
 

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Creating Nano Technologies, Inc.
59 Alley 21 Lane 279, Chung Cheng Road, Yung Kang City, Tainan, TAIWAN
TEL:886-6-2323927 FAX:886-6-2013306 URL: http://www.creating-nanotech.com

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