Corona Poling (Polarization) Equipment POL-57A

Creating Nano Technologies Inc., with decades of superior plasma technology development, equipment manufacturing experience, has launched a batch-type corona polarization equipment POL-57A. Combined with optimized plasma electrode and power supply design, plasma diagnosis technology, and equipment automation, this equipment is suitable for processing the polarization process of piezoelectric thin films processing. It is easy to operate with a human-machine interface, has the ability to suppress electrical arc, and has intelligent process diagnosis functions.

• Can be equipped with front-end module (EFEM) and/or robotic arm to automatically load/unload products.
• One-button automatic operation for an easy and more stable performance
• Programmable and modular process setting: easy to set equipment action and process parameters, suitable for R&D or production
• Multi-patented smart process: multiple sensors are installed to monitor process data in real time to record process stability, abnormal prediction, etc.

• Various organic piezoelectric film (e.g. Arkema’s Piezoelectric® FC20, copolymer and homopolymer) applications:
• pressure sensor
• Biometric (fingerprint) chip
• Actuator
• membrane speaker
• etc